MONITORING METHOD OF INNER PART FURNACE,申请号KR19950052897-传众专利搜索

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发明名称	MONITORING METHOD OF INNER PART FURNACE
摘要
申请公布号	KR0168354(B1)	申请公布日期	1999.02.01
申请号	KR19950052897	申请日期	1995.12.20
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HONG, SUNG-HYUN;LEE, YONG-BOK
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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