| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting and correcting an analytical error of a fringe image that performs Fourier transform on data of a striped graphical content obtained by phase shift method, and finds carrier frequency and complex amplitude that occurs with misalignment of wave surface from both a incurred remark shape and basis, and detects the quantity of displacement and inclination of phase shift, and simply eliminate implication from the errors of quantity of inclination/quantity of displacement in phase shift elemental device by correcting a result obtained with phase shift method. SOLUTION: Interference fringe image that bears shape information of the object to be observed overlaid with a space carrier stripe is obtained by CCD camera (S1). After that, Fourier transform is performed on the interference fringe image data obtained (S2). Space carrier frequency (fx, fy) is extracted (S3). Fourier transform striped analysis is performed according to this carrier frequency, c (x, y) is found (S4). Next, the quantity of displacement on a reference face is found (S5). By (S5), the quantity of phase shift the quantity of displacement is corrected is found (6). Besides, when striped image analysis is found, the phase shift of the object to be observed of which the error is corrected is found (S7).
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