IMPRINTING DEVICE, IMPRINTING METHOD, AND ARTICLE MANUFACTURING METHOD

摘要

The purpose of the present invention is to provide an imprinting device capable of accurately detecting the surface state of a substrate even if the surface state of the substrate has changed. Disclosed is an imprinting device which causes a molding die and an imprinting material on a substrate to come into contact with each other, and which forms a pattern of the imprinting material on the substrate. The imprinting device is characterized by having a detection unit which irradiates the substrate with light, detects the state of the imprinting material on the substrate by optically detecting reflected light from the substrate, and switches detection conditions during an imprinting step.