A PROCESS FOR CAPPING AN EXTREMELY LOW DIELECTRIC CONSTANT FILM AND A SUBSTRATE PRODUCED THEREFROM,申请号KR20000061249-传众专利搜索

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发明名称	A PROCESS FOR CAPPING AN EXTREMELY LOW DIELECTRIC CONSTANT FILM AND A SUBSTRATE PRODUCED THEREFROM
摘要
申请公布号	KR100751990(B1)	申请公布日期	2007.08.28
申请号	KR20000061249	申请日期	2000.10.18
申请人		发明人
分类号	H01L21/314;C23C16/30;C23C16/32;C23C16/40;C23C16/448;H01L21/312;H01L21/316;H01L21/768;H01L23/522	主分类号	H01L21/314
代理机构		代理人
主权项
地址

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