MANUFACTORY METHOD OF NANO-MASTER WITH HYBRID NANO-PATTERN

摘要

A nano master manufacturing method having hybrid nano pattern is provided to maximize production effect by depositing aluminium on the silicon wafer, forming an aluminum layer and forming a nano pattern having a stable form. A nano master manufacturing method having hybrid nano pattern comprises; forming an aluminum layer into upper part of silicon wafer by sputtering; electrolytic polishing the upper side of the aluminum layer; etching oxidized aluminum oxide layer of the upper part of the aluminum layer; anode-oxidating electropolished aluminum layer of the upper part of silicon wafer; removing the aluminum oxide layer of the anode oxidation by etching and forming a nano pattern at an upper part of the aluminum layer; manufacturing a Ni stamper forming the nano pattern; and removing the aluminum layer and a silicon wafer from the Ni stamper and manufacturing a mold of the Ni stamper in which the nano pattern is formed.