发明名称 Magnetoplasmadynamic processor, applications thereof and methods
摘要 Embodiments of magnetoplasmadynamic processors are disclosed which utilize specially designed cathode-buffer, anodeionizer and vacuum-insulator/isolator structures to transform a working fluid into a beam of fully ionized plasma. The beam is controlled both in its size and direction by a series of magnets which are mounted in surrounding relation to the cathode, anode, vacuum insulator/isolators and plasma beam path. As disclosed, the processor may be utilized in many diverse applications including the separation of ions of differing weights and/or ionization potentials and the deposition of any ionizable pure material. Several other applications of the processor are disclosed.
申请公布号 USRE34806(E) 申请公布日期 1994.12.13
申请号 US19920879560 申请日期 1992.05.04
申请人 CELESTECH, INC. 发明人 CANN, GORDON L.
分类号 C23C16/513;H05H1/54;(IPC1-7):C23C16/50 主分类号 C23C16/513
代理机构 代理人
主权项
地址
您可能感兴趣的专利