发明名称 Double wall reaction chamber glassware
摘要 A double wall reaction chamber assembly comprising a cylindrical inner wall and a cylindrical outer wall axially parallel thereto, the inner wall having an annular junction with a thickened annular junction flange on the outer surface thereof. The lower end of the outer wall being fused to the outer surface of the thickened annular junction. The outer surface of the inner wall and the inner surface of the annular junction flange define a sloping annular drainage channel to a downwardly sloping drainage port, enabling liquid to drain from the junction. The double wall reaction chamber assembly has a cylindrical inner wall and a cylindrical outer wall axially parallel thereto. It has a lower end fused to the inner wall. A gas distribution tube has a gas inlet end and a gas distributor end, the gas distributor end comprising a split tee having a junction. One leg of tee extends in a first direction from the junction around the inner wall to a first outlet terminus, and the other leg of the tee extends from the junction in a second direction around the inner wall in a direction opposite to the first direction and a second outlet terminus. The legs of the tee slope downward from the junction to the respective outlet terminus, whereby liquid in the gas distributor will completely drain from the assembly. <IMAGE>
申请公布号 AU1551299(A) 申请公布日期 1999.08.26
申请号 AU19990015512 申请日期 1999.02.08
申请人 SILICON VALLEY GROUP-THERMCO 发明人 JACK D. FOWLER;PATRICK W. WIESEN;JEFFREY KOWALSKI;ROBERT PARVIN
分类号 H01L21/22;C23C16/44;C23C16/455;C30B25/08;C30B31/10;H01L21/205;H01L21/324 主分类号 H01L21/22
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