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发明名称
Multilayer film
摘要
This disclosure describes system(s) and/or method(s) enabling contacts for individual nanometer-scale-thickness layers of a multilayer film.
申请公布号
US2006194420(A1)
申请公布日期
2006.08.31
申请号
US20050068363
申请日期
2005.02.28
申请人
KORNILOVICH PAVEL;MARDILOVICH PETER;RAMAMOORTHI SRIRAM
发明人
KORNILOVICH PAVEL;MARDILOVICH PETER;RAMAMOORTHI SRIRAM
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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