STAGE UNIT OF SEM

摘要

A stage unit of the miniature scanning electron microscope is provided to drive the stage for the sample loading to the X-axis, the Y-axis, the Z-axis and the rotational direction with minimum size. A chamber door(10) opens and closes the sample chamber. A support base(20) enters and leaves into/from the sample chamber while opening and shutting the sample chamber by the chamber door. The X-Y translation stage(30) is moved to the X-Y axis comparing to the support base. A sample holder(40) moves up and down to Z axial direction comparing to the X-Y translation stage and rotates comparing to the Z-axis. Z shaft driving part(50) moves the sample holder up and down to the Z-axis direction.