CHARGED PARTICLE BEAM DEVICE AND ABERRATION CORRECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of reducing axis adjustment man hours and adjustment time even when including a multistage multipole type aberration corrector.SOLUTION: Disclosed is a charged particle beam device including: a multistage multi-pole type aberration corrector 103; a deflector 108; a power source 131 including a quadrupole wobbler circuit in which slight movement of quadrupole intensity is independently performed at each stage of multi-poles; an axis deviation calculation part which calculates an image shift amount due to slight movement of the quadrupole intensity; and a deflection amount calculation part which calculates the deflection amount fed-back to the multi-poles and the deflector 108 in accordance with the image shift amount. The deflection amount calculated by the deflection amount calculation part is obtained by interlockingly executing deflection having a plurality of stages in the aberration corrector.SELECTED DRAWING: Figure 1