发明名称 A process for the electroless deposition of metal on a substrate
摘要 <p>A process for the metalization of substrates is disclosed. The metal either forms a coating over the entire substrate, or it is patternwise deposited on the substrate surface. Metal is patternwise formed on the substrate either by forming a pattern of resist material on the substrate and depositing the material in the interstices defined by the pattern or by forming a patterned resist layer over a metal layer and transferring the pattern into the substrate using conventional techniques. The patterned resist layer is formed on the substrate using conventional techniques. The substrate is treated with reagents that promote the electroless plating of metal on the substrate surface. If the resist material has been previously formed on the substrate surface, the substrate surface is then dried. The remaining resist is then removed from the substrate surface. The substrate surface is then exposed to an electroless plating bath to form nickel onto those portions of the substrate surface that were treated with the sensitizing and activating solutions. The substrate is then heated to at least 180 DEG C. Additional layers of metal are formed on the substrate. After the additional layers are so formed, the substrate is again heated to a temperature of at least about 180 DEG C after each layer is so formed.</p>
申请公布号 EP0708581(A2) 申请公布日期 1996.04.24
申请号 EP19950307184 申请日期 1995.10.11
申请人 AT&T CORP. 发明人 EVANS, MICHAEL D.;LAW, HENRY HON;KIM, TAE YONG;WU, TE-SUNG
分类号 C23C18/16;C23C18/18;C23C18/52;H01L21/288;H05K1/03;H05K1/16;H05K3/18;H05K3/24;H05K3/38;(IPC1-7):H05K3/18 主分类号 C23C18/16
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