| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method of manufacturing an edge reflection-type surface wave device, in which chippings are not generated and a high-accuracy reflecting edge can be formed, even if a piezoelectric substrate composed of a piezoelectric single crystals, such as an LiTaO3 piezoelectric plate or an LiNbO3 piezoelectric plate which does not contain a toxic substance such as lead or the like is used. SOLUTION: The method of manufacturing the edge reflection type surface wave device which comprises a first reflecting edge and a second reflecting edge which are faced comprises a process, in which the first and second reflecting edges are formed, while grooves not reaching the rear of the piezoelectric substrate are formed sequentially on the surface of the piezoelectric substrate, a process in which the surface of the substrate with the formed cut grooves is polished, and a process in which a plurality of interdigital transducers are formed on the surface of the polished substrate.
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