发明名称 |
Method for fabricating multi-channel array optical device |
摘要 |
A method for fabricating a multi-channel array optical device having uniform spacing between different wavelengths and for having precise wavelengths by accomplishing wavelength adjustment and by the forming of mirror layers simultaneously through a multi-layer binary mask and a selective oxidization process. This method is especially useful for fabricating multi-channel array optical devices including multi-channel passive filters and multi-channel surface emitting laser arrays. The method includes forming a plurality of semiconductor mirror layers on a semiconductor substrate; forming an oxidization protective layer on the plurality of semiconductor mirror layers; selectively removing the oxidization protective layer by using a binary mask to expose the semiconductor mirror layer which will adjust a wavelength; oxidizing the exposed semiconductor mirror layer.
|
申请公布号 |
US6475818(B1) |
申请公布日期 |
2002.11.05 |
申请号 |
US20000498507 |
申请日期 |
2000.02.04 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KWON O KYUN;YOO BYUENG SU;SHIN JAE HEON;BAEK JONG HEOB |
分类号 |
H01L31/18;G01R31/26;H01L21/00;H01L27/144;H01L27/146;H01L31/0232;(IPC1-7):G01R31/26 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|