发明名称 Method of manufacturing mirror support post of micromirror device using electro-plating process
摘要 An embodiment of the present invention relates to a digital micromirror device. More particularly, an embodiment of the present invention relates to a method of manufacturing a digital micromirror device having a perfectly flat mirror surface, wherein a hole of a mirror surface from which light is reflected is obviated by forming a mirror support post portion using an electro-plating process, unlike the related art digital micromirror device in which the hole is formed at the center of the mirror surface, thereby degrading the reflection efficiency of light.
申请公布号 US2007199823(A1) 申请公布日期 2007.08.30
申请号 US20060363846 申请日期 2006.02.28
申请人 JEON JIN-WAN;KIM DAE-HYUN;YOON JUN-BO;LIM KOENG S 发明人 JEON JIN-WAN;KIM DAE-HYUN;YOON JUN-BO;LIM KOENG S.
分类号 C25D1/10 主分类号 C25D1/10
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