| 摘要 |
Process for forming the source and drain electrodes (6, 7), which comprises the steps consisting in firstly depositing a first layer of metal having a defined thickness, under an atmosphere of a mixture of PH3 and Ar gases in a predetermined proportion so that a small quantity of PH3 is contained in the first layer of metal, and secondly in depositing a second layer of metal having a defined thickness onto the first layer of metal, under an atmosphere of Ar gas, in such a way that the source and drain electrodes additionally act as an ohmic contact. <IMAGE>
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