发明名称 Method of nitriding silicon
摘要 A process for nitriding materials containing silicon to form a silicon nitride material predominantly in the alpha phase is disclosed which includes nitriding the silicon-containing material by (a) heating the silicon-containing material in an atmosphere containing at least hydrogen in the temperature range of about 0 DEG C. to about 800 DEG C. and (b) thereafter, nitriding the silicon-containing material by subjecting the silicon-containing material to a nitriding atmosphere containing at least nitrogen gas in the temperature range of from about 1000 DEG C. to about 1450 DEG C. to effect nitriding.
申请公布号 US6007789(A) 申请公布日期 1999.12.28
申请号 US19940270613 申请日期 1994.07.05
申请人 EATON CORPORATION 发明人 EDLER, JAMES P.
分类号 C01B21/068;C04B35/591;(IPC1-7):C01B21/068;C01B21/06 主分类号 C01B21/068
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