Apparatus for removing static electricity in plasma process chamber,申请号KR19990030726-传众专利搜索

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发明名称	Apparatus for removing static electricity in plasma process chamber
摘要
申请公布号	KR100619581(B1)	申请公布日期	2006.09.01
申请号	KR19990030726	申请日期	1999.07.28
申请人		发明人
分类号	H05F3/02	主分类号	H05F3/02
代理机构		代理人
主权项
地址

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