| 摘要 |
PROBLEM TO BE SOLVED: To easily optimize the action of individual peeling means according to the arrangement of the peeling means, in a peeling method and a peeling device which peel two plate-like bodies adhering to each other.SOLUTION: Holding means 30 holds an adhesion body WK by holding a first plate-like body BL, and brings a contact member 340 into contact with a second plate-like body SB. In conjunction with the movement of the contact member 340 to the peeling direction, a plurality of peeling means 5i (i=1, 2, ...) arranged along the peeling direction in parallel to the principal surface of the adhesion body WK sequentially hold the second plate-like body SB, and move to a direction separated from the first plate-like body BL so as to peel both bodies. A movement start timing of each of the peeling means 5i is fixed by executing the movement of the contact member 340 in advance, and measuring positional information showing a position of the contact member 340 during moving, and a timing when the contact member 340 passes an opposed position to the peeling means 5i.SELECTED DRAWING: Figure 5 |
