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发明名称
摘要
申请公布号
DE2557125(B2)
申请公布日期
1978.09.28
申请号
DE19752557125
申请日期
1975.12.16
申请人
KOLLMORGEN CORP., HARTFORD, CONN. (V.ST.A.)
发明人
ZEBLISKY, RUDOLPH J., HAUPPAUGE, N.Y. (V.ST.A.)
分类号
C23C18/28;(IPC1-7):C23C3/02
主分类号
C23C18/28
代理机构
代理人
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