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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0661250(A)
申请公布日期
1994.03.04
申请号
JP19920210584
申请日期
1992.08.07
申请人
FUJITSU LTD
发明人
OKAMURA YOSHIRO
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L21/336;H01L29/784
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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