WAFER TRANSPORT CONTROL METHOD

摘要

PURPOSE: To reduce a lead time until finishing of the entire process when a plurality of kinds of wafers are processed in a multi-chamber semiconductor equipment for performing a leaf processing by a method wherein specific first to third steps are respectively performed to decide a chamber to be used. CONSTITUTION: There are provided a first step of deciding a step corresponding to a kind of a wafer 17 received in a wafer cassette 21; a second step of deciding chambers 12 to 15 to be used in the step decided in the first step; and a third step of setting while the chambers 12 to 15 decided in the second step are used. The first to third steps are performed for a plurality of kinds of wafers 17 received in the wafer cassette 21 so as to decide the chambers 12 to 15 used when the plurality of kinds of wafers 17 are received in the wafer cassette 21. For example, a loading chamber 11, the process chambers 12 to 15 and an unloading chamber 16 are arranged around a transfer chamber 10.