METHOD FOR INSPECTING SURFACE

摘要

According to a technical idea of the present invention, a method to inspect a surface comprises: a step of irradiating a test object by changing incident light of a first polarization state into parallel light having a cross section; and a step of measuring the second polarization state of light reflected from the test object. Inspection on the entire area to which the incident light is emitted in an inspection object is able to be carried out using a variation between the first polarization state and the second polarization state. As such, the speed of inspection is able to be improved.