MONITORING OPERATION OF A REACTION CHAMBER

摘要

A method and system for monitoring operation of a reaction chamber for operation malfunctions. The reaction chamber includes a pressure gauge coupled therewith to collect pressure data within the reaction chamber during operation of the reaction chamber. The pressure data is received in a processor and a plurality of pressure readings are generated from the pressure data, identifying pressure changes within the reaction chamber during operation. The plurality of pressure readings are analyzed to identify an abnormal pressure change and an operating malfunction is determined when the abnormal pressure change is identified.

主权项

1. A system for monitoring valve function, the system comprising:
a reaction chamber for receiving a substrate; a plurality of gas inlets for introducing a plurality of gases to the reaction chamber; a plurality of valves, a valve coupled to each gas inlet to control flow of gas through each gas inlet to the reaction chamber; a high-speed pressure gauge coupled to the reaction chamber to monitor pressure within the reaction chamber; and a processor coupled to the pressure gauge configured to:
receive pressure data from the pressure gauge;generate a plurality of pressure readings to identify pressure changes within the reaction chamber due to operation of the plurality of valves;compare the generated pressure readings to a reference pressure reading;analyze the generated pressure readings to identify a change in pressure that differs from the reference pressure reading;identify which valve was operating during the change in pressure; anddiagnose the identified valve as a malfunctioning valve.