METHOD OF FORMING SILICON FILM,申请号JP19890002842-传众专利搜索

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发明名称	METHOD OF FORMING SILICON FILM
摘要
申请公布号	JPH02184033(A)	申请公布日期	1990.07.18
申请号	JP19890002842	申请日期	1989.01.11
申请人	KAWASAKI STEEL CORP	发明人	SATO NOBUYOSHI
分类号	H01L21/31;H01L21/318	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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