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发明名称
摘要
申请公布号	JP3250562(B2)	申请公布日期	2002.01.28
申请号	JP19910068894	申请日期	1991.03.07
申请人		发明人
分类号	H01L21/304;H01L21/52;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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