发明名称 Gate electrode of semiconductor device and method for fabricating the same
摘要 A gate electrode of a semiconductor device according to the present invention includes a substrate, a bulb type recess with an upper recess and a bottom recess, the bottom recess formed in a round shape and having a larger width than the upper recess, a gate insulation layer formed over the substrate and in the bulb type recess, and a polysilicon electrode in the bulb type recess, wherein the polysilicon electrode is formed using two different methods including a growth method
申请公布号 US2007200169(A1) 申请公布日期 2007.08.30
申请号 US20060633055 申请日期 2006.12.04
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM KWANG-OK
分类号 H01L29/78;H01L21/4763 主分类号 H01L29/78
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