摘要 |
A gate electrode of a semiconductor device according to the present invention includes a substrate, a bulb type recess with an upper recess and a bottom recess, the bottom recess formed in a round shape and having a larger width than the upper recess, a gate insulation layer formed over the substrate and in the bulb type recess, and a polysilicon electrode in the bulb type recess, wherein the polysilicon electrode is formed using two different methods including a growth method
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