发明名称 HIGH TEMPERATURE LOCAL HEATING TYPE SUSCEPTOR AND HEATING APPARATUS HAVING THE SAME
摘要 Disclosed are a high-temperature local heating type susceptor and a heating device with the same. The high-temperature local heating type susceptor is designed to enable heat to be focused on a part where heat is emitted as a cross sectional area of the part where heat is emitted is smaller than a cross sectional area of a part where the heat is received. The high-temperature local heating type susceptor according to the present invention is installed in a heat source and partly heats a subject by receiving heat from the heat source. The high-temperature local heating type susceptor includes: a susceptor body with a first cross sectional area and a protrusion unit protruding from the susceptor body and having a cross sectional area smaller than the first cross sectional area.
申请公布号 KR20160082134(A) 申请公布日期 2016.07.08
申请号 KR20140194635 申请日期 2014.12.31
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS;NEXTRON CORPORATION 发明人 KIM, SEUNG EON;NA, YOUNG SANG;KIM, SEONG WOONG;LIM, KA RAM;JANG, YUN HYEONG;MOON, HAK BEOM
分类号 H01L21/683;H01L21/324 主分类号 H01L21/683
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