| 摘要 |
<p>PROBLEM TO BE SOLVED: To absorb evanescent wave generated by totally reflecting a measurement light in a prism to the surface of a sample by making it possible to infinitesimally set the interval between the prism and the sample. SOLUTION: A prism 31 is sucked and held on the upper surface of a holding member 24, checked by a measuring sensor 66, and if required, the upper surface is corrected to become a flat under the control of a correction driver. Then, the parallelism and displacement amount between the sample holding surface 41a and the upper surface of the prism 31 are set by a controller. A semiconductor wafer U is mounted on the surface 41a with the front surface placed at the down side, a plurality of suction pumps are sequentially operated in the plurality of annular grooves of a board-like body 41 and sucked and held without generating the slack at the wafer U. In this case, the applied voltage to a piezoelectric element 18 is regulated so as to become predetermined 0.3μm while monitoring the gap between the surface 41a and the upper surface of the prism 31 by a gap sensor 71, an infrared ray is passed from a light source 37 to the prism 31, an evanescent wave is penetrated to the wafer U from the totally reflecting part and absorbed in response to the component of the substance of the part.</p> |
