| 摘要 |
PROBLEM TO BE SOLVED: To provide heat treatment equipment wherein the temperature decrease speed in the vertical directions of a substrate to be processed can be kept, even while securing a large temperature decrease speed. SOLUTION: The heat treatment equipment comprises a reaction tube 1, a heat equalizer tube 17, and a heater 16 which are set up concentrically. The substrate 5 is heat-treated inside the reaction tube; a first space 18 is formed between the reaction tube and the heat equalizer tube, and a second space 19 is formed between the heat equalizer tube and the heater; a cooling gas is supplied into the first space and is exhausted through the upper end of the heat equalizer tube; and a cooling gas is supplied also into the second space from the external surface of the heater and a exhausted through the upper end of the heater.
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