METHOD FOR RECYCLING HELIUM AND DEVICE FOR IMPLEMENTING THE SAME

摘要

The invention relates to a method for making silicon ingots according to the Czochraski technique (Cz), characterised in that the helium or the helium-based gas mixture used as an inert gas in the reactor (1), or Czochraski reactor, or in the furnace, or Czochraski furnace, is submitted at the outlet of said Czochraski reactor or furnace to a processing that comprises the following steps: a) the step of cooling (3) the outgoing gas or gas mixture; b) the step of compressing (4) the outgoing gas or gas mixture cooled during step a); c) the step of filtering (5) the outgoing gas or gas mixture compressed during step b) in order to remove the solid particles; and d) the step of purifying (6) the outgoing gas or gas mixture filtered during step c) in order to remove impurities.