发明名称 GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE, AND PRODUCTION METHOD OF GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a new technology for producing a group III nitride semiconductor substrate.SOLUTION: There is provided a group III nitride semiconductor substrate 1 having a tabular first layer 2 including a plurality of crystal pieces 10 of a group III nitride semiconductor arranged with each clearance 30 therebetween, and a binder 20 interposed between each clearance 30, for holding the plurality of crystal pieces 10, and the clearance 30 has a width widened gradually from a first principal surface 3 toward a second principal surface 4 of the first layer 2.SELECTED DRAWING: Figure 1
申请公布号 JP2016150865(A) 申请公布日期 2016.08.22
申请号 JP20150028354 申请日期 2015.02.17
申请人 FURUKAWA CO LTD 发明人 MATSUEDA TOSHIHARU;ISHIHARA YUJIRO;GOTO HIROKI;NAKAGAWA TAKUYA
分类号 C30B29/38 主分类号 C30B29/38
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