| 摘要 |
The present invention provides an integrated light source module unit for exposure, the light source module unit comprising: a central light source unit including a light source panel in which a plurality of unit ultraviolet light emitting diodes (UV LEDs) are mounted in an array in the form of a matrix on a circuit board, and an optical panel which is disposed on a light-emitting side of the light emitting diode so as to face the light source panel, and has a plurality of unit condenser lens which are configured in an array in the form of a matrix that deviates, with respect to the main light axis, from positions respectively corresponding to each of the light emitting diodes toward an arbitrary reference axis that passes the center of the UV LED array on the light source panel; and a plurality of peripheral light source units uniformly disposed radially and inclined so as to face the main light emitting axis of the unit UV LED in the central light source unit. Through such a combination of modules, the light source module unit may achieve low power consumption by maximizing optical power and achieve a single wavelength ultraviolet light having high efficiency and optical power. Consequently, an exposure performance capable of dramatically improving the miniaturization and resolution of an exposure pattern may be realized while economically replacing the light source of an existing exposure device. |
