| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical stack containing a sub-stoichiometric dielectric layer whose characteristics are controlled so as to stabilize optical properties of the optical stack, such as transmission and reflection.SOLUTION: A sub-stoichiometric oxide, nitride or oxynitride in an optical stack, alone or in direct contact with one or two stabilizing layers, stabilizes optical properties of the optical stack. The stabilizing layers stabilizes chemical and optical characteristics of the sub-stoichiometric layer during heating. Change in optical characteristics of the sub-stoichiometric layer during heating counters optical characteristics of a rest of the optical stack.SELECTED DRAWING: Figure 2 |
