发明名称 CARRIER TRANSFER APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a transfer apparatus which has simple configuration without up-and-down movements of a carrier and its guide and a mechanism for this movements, capable of saving time to transfer the carrier by reducing the movements. SOLUTION: A measuring object device is loaded on a carrier 4. The carrier 4 is put in a thermostatic bath 15 to measure the device. A shutter 14 is provided in the thermostatic bath to open and close the opening 30. A carrier guide 17 is provided to guide the carrier 4 to transfer the carrier 4 in the direction orthogonal to the take-out direction, after taking it out from the thermostatic bath 15. Since the carrier guide 17 is provided together with the shutter 14, when the shutter is opened, the carrier guide 17 is moved to a waiting position for not preventing the carrier 4 from being taken out. When the shutter is closed, the carrier guide is also moved to a guiding position for transferring the carrier 4 in the above mentioned direction.
申请公布号 JP2002164404(A) 申请公布日期 2002.06.07
申请号 JP20000358192 申请日期 2000.11.24
申请人 ANDO ELECTRIC CO LTD 发明人 UCHINO YOSHIAKI;ARAKAWA OSAMU
分类号 G01R31/26;G01R31/01;G01R31/28;H01L21/677;(IPC1-7):H01L21/68 主分类号 G01R31/26
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