| 摘要 |
<p>PURPOSE:To obtain this sensor which is free from the influence of lead wires and generates a stable final output by adhering and fixing the intermediate part of a lead wire connected to electrically to piezoelectric elements for detection to joining members for sensor elements. CONSTITUTION:The piezoelectric elements 1 for detection and piezoelectric elements 2 for driving are joined by the joining members 6 while having their vibrating directions so that they are intersected orthogonally with each other, and the joined couples of elements are joined in tuning fork structure by an electrode block 3 to be the joining members and fixed to a base 5 by a supporting rod 4. For an electric connection, a lead pin 8 embedded in the base 5 is connected to the piezoelectric elements 2 for driving by a lead wire 7a, and a lead pin 8 held by a holding plate 9 is fixed mechanically to the joining members 6 by a lead wire 7b with an adhesive, etc., and then connected to the piezoelectric elements 1 for detection by a lead wire 7c. Consequently, the lead wires can be made short, a intrinsic oscillation frequency becomes sufficiently high, and variance in the intrinsic vibration frequency due to the variation or the dispersion in shape among the lead wires is suppressed, so the influence of the vibration of the piezoelectric elements for detection upon driving is reduced and the final output becomes stable.</p> |
