发明名称 |
Patterning PEDOT:PSS layer by controlled electrochemical reaction |
摘要 |
A method for monitoring a substrate patterning process, wherein at least two electrodes (2, 3) are used to apply a voltage to the substrate (1) to cause a reaction in a portion of the substrate, comprises recording a current driven by said voltage as a function of time and/or as a function of a position of the substrate (1) or a patterning mask. Also disclosed are a device and a computer program product for monitoring the substrate patterning process.
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申请公布号 |
EP1916670(A2) |
申请公布日期 |
2008.04.30 |
申请号 |
EP20070119282 |
申请日期 |
2007.10.25 |
申请人 |
ACREO AB |
发明人 |
NORDLINDER, STAFFAN;ROBINSON, NATHANIEL D.;THERANI, PAYMAN |
分类号 |
H01B1/12;H05K1/02;H05K3/07 |
主分类号 |
H01B1/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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