发明名称 |
aparelho e método para fabricar um dispositivo eletrônico |
摘要 |
An apparatus and method to fabricate an electronic device is disclosed. In a particular embodiment, an apparatus includes a template having an imprint surface. The imprint surface includes a first region having a first pattern adapted to fabricate a fin field effect transistor (FinFET) device and a second region having a second pattern adapted to fabricate a planar electronic device. |
申请公布号 |
BRPI1010863(A2) |
申请公布日期 |
2016.08.09 |
申请号 |
BR2010PI10863 |
申请日期 |
2010.06.03 |
申请人 |
QUALCOMM INCORPORATED |
发明人 |
BEOM-MO HAN;MOHAMED HASSAN ABU-RAHMA;SEUNG-CHUL SONG |
分类号 |
G03F7/00;H01L21/3213;H01L21/336;H01L21/8234;H01L29/78 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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