发明名称 PHOTOMETER FOR MEASURING
摘要 An arrangement and photometer for measuring and controlling the thickness of optically active thin layers wherein the axis of the measurement light beam coming from the measurement light source is directed to the measurement object and a referenced light receiver, independent of the optical properties of the measurement object, is associated with the measurement light beam. The output signal of the referenced light receiver is mixed with a trigger stage for a phase sensitive photometer amplifier and is fed to a compensation circuit for the equilization of brightness variations in the measurement light source.
申请公布号 AU2625977(A) 申请公布日期 1979.01.04
申请号 AU19770026259 申请日期 1977.06.21
申请人 LEYBOLD-HERAEUS GMBH & CO. KG. 发明人 HORST SCHWIECKER;GERNOT THORN;HANS-PETER EHRL
分类号 C23C14/54;G01B11/06;G05D5/03 主分类号 C23C14/54
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