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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0427118(A)
申请公布日期
1992.01.30
申请号
JP19900131903
申请日期
1990.05.22
申请人
FUJI ELECTRIC CO LTD
发明人
OKABAYASHI TAKEKI
分类号
H01L21/225
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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