| 摘要 |
A combined scanning and focusing magnet for an ion implantation system is provided. The combined scanning and focusing magnet has a yoke having a high magnetic permeability. The yoke defines a hole configured to pass an ion beam therethrough. One or more scanner coiis operabiy are coupled to the yoke and configured to generate a time-varying predominantly dipole magnetic field when electrically coupled to a power supply. One or more focusing coils are operabiy coupled to the yoke and configured to generate a predominantly muitipo!e magnetic field, wherein the predominantly multipoie magnetic field is one of static or time-varying. |
