APPARATUS FOR MANUFACTURING NANO-SCALE 3-DIMENSIONAL STRUCTURE AND METHOD THEREOF

摘要

The present invention relates to an apparatus and a method for manufacturing nano-scale three-dimensional structures. According to the present invention, the apparatus for manufacturing nano-scale three-dimensional structures utilizes a nano-focusing printing method and comprises: a first operation unit which coats a sacrificial layer on a substrate according to a first control signal; a second operation unit which scans a focused ion beam according to a second control signal and forms a three-dimensional structure frame by means of the focused ion beam scanning; a third operation unit which forms layers with nanoparticles on the three-dimensional structure frame according to a third control signal by using a focused printing method; a fourth operation unit which removes the sacrificial layer remaining on the substrate on which the nanoparticles are layered according to a fourth control signal; a transport unit which transports the substrate, according to a transport signal, to one among the first, second, third, and fourth operation units; and a control unit which stores a process plan, and generates the first, second, third, and fourth control signals and the transport signal according to the process plan.