| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus for vacuum sucked transfer equipped with charge neutralizing function, and its transfer method. SOLUTION: A vacuum sucked transfer apparatus has a vacuum sucking pad 10 which vacuum sucks an object WP to be transferred. Further, in a vacuum-destructing-air feeding systems 42, 44 and 46 for feeding to the vacuum suction pad pad 10 a vacuum destructing air, an ionizer 48 is provided to ionize the vacuum destructing air. When the vacuum sucking pad 10 releases the transferred object WP, the vacuum destructing ionized air is blown against the transferred object WP to neutralize and remove the charge of the transferred object WP.</p> |
