| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle which produces a bigger distribution of gaseous cluster by utilizing together with extra-ultraviolet light source, and increases the efficiency of extra-ultraviolet light. SOLUTION: The nozzle includes the first means 60 which swells gas in order to form many clusters, the second means 62 which compresses gas in order to reduce the number of clusters by means of evaporating clusters, and the third means 70 which swells gas in order to enlarge the clusters which are reduced in number. The first means includes the first throat 50, and the second means includes the second throat 54, the diameter of which is bigger than that of the first throat. |
