FLOW-RATE CONTROLLER, AND REGULATOR UNIT AND VALVE UNIT USED FOR THE SAME

摘要

A highly versatile flow-rate controller that is easy to handle and a regulator unit and a valve unit used for the same are provided. The flow-rate controller includes a regulator unit having a regulator and a first pressure sensor, a valve unit having a second pressure sensor and a flow-rate control valve, and an orifice unit that is connected to the regulator unit and the valve unit in a detachable manner and that has a fluid channel and an orifice that connect to the regulator unit and the valve unit.