| 主权项 |
1. A method for alignment and contact-making of a first substrate with a second substrate, the method comprising:
fixing the first substrate on a first mount and fixing the second substrate on a second mount which is located opposite the first mount, wherein the first and second substrate are located between the first and second mount with a distance A between a first contact surface of the first substrate and a second contact surface of the second substrate in the Z direction, moving the first mount to a first detection unit in a first detection position and moving the second mount to a second detection unit in a second detection position opposite to the first detection position, detecting a first X-Y position of a first alignment marking located in a peripheral region of the first substrate in the first detection position which has moved in an X and/or Y direction along the first contact surface, detecting a second X-Y position of a second alignment marking located in a peripheral region of the second substrate in the second detection position which has moved in an X and/or Y direction along the second contact surface, moving the first mount to the second detection unit in the second detection position and the second mount to the first detection unit in the first detection position, detecting a third X-Y position of a third alignment marking located in a peripheral region of the first substrate in the second detection position, detecting a fourth X-Y position of a fourth alignment marking located in a peripheral region of the second substrate in the first detection position, aligning the first substrate relative to the second substrate by adjustment units based on the first, second, third and fourth X-Y positions which have been detected by the detections, and contacting the first substrate, which has been aligned relative to the second substrate, with the second substrate. |
