| 摘要 |
In a film-forming process comprising depositing a molecule composed of a plurality of atoms on a substrate or reacting the molecule with an atom in the substrate to produce a compound, an improvement which comprises generating plasma in an atmosphere of a mixed gas of the molecule with an inert gas having a metastable energy level higher than the energy required for transferring the molecule to an atomic state, to thereby dissociate the molecule into atoms in advance prior to forming a film. This eliminates the need for dissociation of the molecule on the substrate and allows the practice of the film-forming process at a low temperature.
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