发明名称 Device for vibrating cantilever
摘要 There is disclosed a device for applying vibrations to a cantilever used in an atomic force microscope. The cantilever has a base portion, and a probe is attached to the front end of the cantilever. The device has a piezoelectric plate subassembly consisting of first and second piezoelectric plates having junction faces cemented together. A piezoelectric plate subassembly support portion supports a part of the second piezoelectric plate. A voltage is applied to the piezoelectric plates so that one of them is stretched vertical to the junction faces and that the other is contracted vertical to the junction faces.
申请公布号 US6006595(A) 申请公布日期 1999.12.28
申请号 US19970911444 申请日期 1997.08.12
申请人 JEOL LTD. 发明人 KITAMURA, SHINICHI
分类号 G01B21/30;G01B7/34;G01N37/00;G01Q60/32;G01Q60/38;(IPC1-7):G01B7/34 主分类号 G01B21/30
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