发明名称 |
Method of manufacturing ceramic film and structure including ceramic film |
摘要 |
A method of manufacturing a ceramic film by using an AD method, by which a film having good crystallinity can be fabricated without using a high-temperature process. The method of manufacturing a ceramic film by using an aerosol including the steps of: (a) dispersing ceramic raw material powder containing an amorphous component in a gas to generate an aerosol; and (b) supplying the aerosol generated at step (a) into a chamber in which a substrate is placed and depositing the ceramic raw material powder on the substrate to form a ceramic film.
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申请公布号 |
US2006125352(A1) |
申请公布日期 |
2006.06.15 |
申请号 |
US20050294541 |
申请日期 |
2005.12.06 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
SAKASHITA YUKIO;FUJII TAKAMICHI |
分类号 |
H01L41/18;C23C16/00 |
主分类号 |
H01L41/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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