| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chucking board 1 capable of long term application without causing the cloggings in a sucking hole. SOLUTION: A vacuum chucking board 1 is formed of a sucking surface 4 provided with a sucking hole 3 for vacuum chucking a work W, while the chucking surface 4 is coated with a gas permeable porous resin layer 6 in mean fine hole diameter of 2.5-15 μm and a thickness width of 0.1-1.0 mm on the chucking surface 4. As a result of this, a constitution, the work W can be firmly chucking-held without deteriorating the suction characteristics at all as well as almost avoiding the permeation of a liquid to the chucking surface 4. Because of this, when the vacuum sucking board 1 is used for grinding, machining, cutting down, etc., even, if these operations are performed repeatedly, the clogging in a sucking hole 3 can be avoided since no abrasive grains, processed pieces, dust, etc., are deposited in the chucking hole 3 on the chucking surface 4. |
