发明名称 METHOD OF PACKAGING SEMI-CONDUCTOR
摘要 A method for packaging a semiconductor is provided to avoid warpage of a PCB and a wafer while shortening an interval of process time by uniformly depositing paste on a wafer in a semiconductor packaging process and by reduce an interval of B-staging time. Die attach paste with viscosity of 1500-100000 cps is prepared. The die attach paste of a predetermined thickness is coated on a wafer by using a spin coater. A B-staging process is performed on the coated paste. In the B-staging process, a thermal dry process is performed on the coated paste at a temperature of 40-200 °C.
申请公布号 KR100792950(B1) 申请公布日期 2008.01.08
申请号 KR20070005990 申请日期 2007.01.19
申请人 LS CABLE LTD. 发明人 SEO, JOON MO;KANG, BYOUNG UN;WI., KYUNG TAE;KIM, JAE HOON;SUNG, TAE HYUN;HYUN, SOON YOUNG
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
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